MICROELETTROMECHANICAL SYSTEMS
Course objectives
ENG GENERAL The course intends to provide the student the tools for the understanding, the analysis of the working principles, the manufacturing technologies, and the performance of microelectromechanical systems (MEMS). The student acquires knowledge related to miniaturization strategies of microelectromechanical systems, the impact on geometries and physics, the technological solutions for its fabrication. Examples will be provided, for different categories, from first prototypes to state-of-the-art systems, from ideas in scientific papers to solutions on the market. Materials, working principles, fabrication and packaging strategies will be examined for various devices currently employed in daily life. SPECIFIC • Knowledge and understanding: Thorough knowledge of the main systems built with microelectromechanical components, with focus on the physics, the working principles of the single components and the manufacturing techniques. • Applying knowledge and understanding: Capability to analyze and compare the state-of-the-art microelectromechanical systems design and their use in diverse modern-day applications. • Making judgements: Ability to understand, design, choose and compare state-of-the-art microelectromechanical systems. • Communication skills: : ability to understand, describe and present state-of-the-art microelectromechanical systems. • Learning skills: learning abilities suitable for working environments where design, prototyping, testing and performance analysis of microelectromechanical systems take place.
- Lesson code1019528
- Academic year2025/2026
- CourseElectronics Engineering
- CurriculumIngegneria Elettronica (percorso valido anche ai fini del conseguimento del doppio titolo italo-statunitense o italo-francese)
- Year1st year
- Semester2nd semester
- SSDING-INF/01
- CFU6